Mask Defect Magnetorheological Finishing
Applications
Repair of mask defect.
Working Principle
Magnetorheological polishing technology is that it uses rheological property of magnetorheological fluid in a magnetic
field to polish optical elements. The biggest difference between it and traditional polishing method is that it can polish
the traditional free abrasives to form Bingham fluid under the action of magnetic field,thus realizing flexible polishing.
Features
| Model | RTB800-400 |
| Functional features |
Detection according to the scratch, automatic positioning of origin point, automatic setting of polishing area and path, and automatic feeding and blanking. |
| Repair size | 800*400mm (Customizable) |
| Minimum movement precision | 1μm |
| Travel distance |
X direction: 800mm, Y direction: 400mm, Z direction: 500mm |
| Product advantages |
Repair on flat surface and curved surface, simple control, width precision control of magnetorheological fluid ribbon, automatic setting of repair origin point, repair path, repair time and other parameters to improve repair efficiency. |
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Note: Customized production available. |
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Polishing Effect Inspection Chart
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