Magnetron Sputtering Deposition in Perovskite Thin-film Battery Industry
Applications
| Applications | Specific Purpose | Material Type |
| Perovskite thin-film battery | Transparent conducting layer | ZnO:Al |
Working Principle
Magnetron sputtering is to constrain and extend the motion paths of electron by magnetic field, change the motion
directions of electron, increase the ionization rate of working gas and effectively use the energy of electrons.
Magnetron sputtering has the following characteristics: rapid deposition rate, high deposition efficiency, suitable for
large-scale application in industrial production; low substrate temperature, suitable for the coating of plastics and
other heat resisting substrates; high purity of the prepared films, good compactness, better film uniformity and strong
film-substrate cohesion; metal, alloy, oxide and other films can be prepared; pollution-free.
Features
| Model | MSC-PFB-X—X |
| Coating type | Various dielectric films such as metal film, metal oxide and AIN |
| Coating temperature range | Normal temperature to 500℃ |
| Coating vacuum chamber size | 700mm*750mm*700mm (Customizable) |
| Background vacuum | < 5×10-7mbar |
| Coating thickness | ≥ 10nm |
| Thickness control precision |
≤ ±3% |
| Maximum coating size | ≥ 100mm (Customizable) |
| Film thickness uniformity | ≤ ±0.5% |
| Substrate carrier | With planetary rotation mechanism |
| Target material | 4×4 inches(compatible with 4 inches and below) |
| Power supply | The power supplies such as DC, pulse, RF, IF and bias are optional |
| Process gas |
Ar, N2, O2 |
| Note: Customized production available. | |
Coating Sample
Process Steps
→ Place the substrate for coating into the vacuum chamber;
→ Roughly vacuumize;
→ Turn on molecular pump, vacuumize at top speed, then turn on the revolution and rotation;
→ Heating the vacuum chamber until the temperature reaches the target;
→ Implement the constant temperature control;
→ Clean elements;
→ Revolve and back to the origin;
→ Coating film according to process requirements;
→ Lower temperature and stop the pump assembly after coating;
→ Stop working when the automatic operation is finished.
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