Display Panel Surface defect detector
Applications
For the process control and yield management of display panel manufacturing, we can help manufacturers to
identify and monitor the mask defects, reduce the risk of yield and improve their independent ability of R&D for
core technologies.
Working Principle
4x telecentric lens, specific angle ring light and coaxial light source are selected as the visual approach to
automatically locate the defect positions, so as to automatically detect the defects on the mask surface.
Features
|
Model |
SDD-DP-X—X | |
|
Performance detection |
Detectable defect type | Scratches, Dusts |
| Detectable defect size | 1μm | |
| Detection accuracy (measured) |
100% detection of defects / collection of defects (scratches, dust) |
|
| Detection efficiency |
≤10 minutes ( Measured value : 350mm x 300mm Mask) |
|
|
Optical System Performance |
Resolution | 1.8μm |
| Magnification | 40x | |
| Field of view | 0.5mm x 0.5mm | |
| Blue light illumination | 460nm, 2.5w | |
|
Motion Platform Performance
|
X, Y two-axis motion Marble countertop flatness: 2.5μm Y-axis Z-direction runout precision: ≤ 10.5μm Y-axis Z-direction runout precision: ≤8.5μm |
|
| Note: Customized production available. | ||
Detection Images
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